Understanding MEMS : principles and applications - Castaner, Luis (Hoboken, New Jersey : John Wiley & Sons, 2015)
Scaling of forces -- Elasticity -- Bending of microstructures -- Piezoresistance and piezoelectricity -- Electrostatic driving and sensing -- Resonators -- Microfluidics and electrokinetics -- Thermal devices -- Fabrication.
Includes bibliographical references and index.
Keywords: Microelectromechanical systems