Castaner, Luis, <br/><br/>
Understanding MEMS :  principles and applications / 
spine title :  undestanding MEMS. 
Luis Castaner. 
 - xiv,314 pages ;  25 cm. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/>Scaling of forces -- Elasticity -- Bending of microstructures -- Piezoresistance and piezoelectricity -- Electrostatic driving and sensing -- Resonators -- Microfluidics and electrokinetics -- Thermal devices -- Fabrication. 
<br/><br/><label>ISBN: </label>9781119055426  RM465.08 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.