TY  - BOOK
AU  - Van Zant,Peter
TI  - Microchip fabrication: a practical guide to semiconductor processing 
SN  - 9780071821018 (hardback)
PY  - 2014///]
CY  - New York
PB  - McGraw-Hill Education
KW  - Semiconductors
KW  - Design and construction
KW  - Integrated circuits
N1  - Includes bibliographical references and index
N2  - 'This fully updated introduction to semiconductor manufacturing--the industry that drives high tech--offers a low-math, straightforward approach to the entire process, from raw materials through shipping the finished, packaged device'--
ER  -