TY  - BOOK
AU  - Yoo,Chue San
TI  - Semiconductor manufacturing technology
SN  - 9789812568236 (hbk.)
PY  - 2008///
CY  - Singapore
PB  - World Scientific
KW  - Semiconductors
KW  - Design and construction
KW  - Semiconductor industry
N1  - Includes bibliographical references and index; Buku bacaan asas fakulti
ER  -