TY  - BOOK
TI  - Smart sensors and MEMS: intelligent devices and microsystems for industrial applications 
T2  - Woodhead publishing series in electronic and optical materials
SN  - 9780857095022
PY  - 2014///
CY  - Philadelphia, PA
PB  - Woodhead Pub.
KW  - Detectors
KW  - Microelectromechanical systems
KW  - Scanning systems
ER  -