Smart sensors and MEMS :  intelligent devices and microsystems for industrial applications / 
edited by Stoyan Nihtianov, Antonio Luque. 
 - 538 pages :  illustrations ;  24 cm. 
 - Woodhead publishing series in electronic and optical materials ;  no. 51. .
 - Woodhead publishing series in electronic and optical materials ;  no. 51. .
<br/><br/><label>ISBN: </label>9780857095022  RM888.57 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Detectors.<br/>Microelectromechanical systems.<br/>Scanning systems.