TY  - BOOK
AU  - Rosminazuin Ab Rahim,
TI  - Process development for piezoresistive microcantilever biosensor using bulk micromachining technique
PY  - 2012///
KW  - Universiti Kebangsaan Malaysia
KW  - Dissertations
KW  - Dissertations, Academic
KW  - Malaysia
KW  - Biosensors
KW  - Microelectromechanical systems
KW  - Biomedical materials
KW  - BioMEMS
N1  - Thesis (Ph.D.) - Universiti Kebangsaan Malaysia, 2012; References : page [223]-224
ER  -