Process development for piezoresistive microcantilever biosensor using bulk micromachining technique - Rosminazuin Ab Rahim (2012)
Thesis (Ph.D.) - Universiti Kebangsaan Malaysia, 2012.
References : page [223]-224.
Keywords: Universiti Kebangsaan Malaysia -- Dissertations; Dissertations, Academic -- Malaysia; Biosensors; Microelectromechanical systems; Biomedical materials; BioMEMS