Rosminazuin Ab Rahim, Process development for piezoresistive microcantilever biosensor using bulk micromachining technique / Rosminazuin binti Ab Rahim. - xxvii, 236 pages : photographs,illustrations ; 30 cm. Thesis (Ph.D.) - Universiti Kebangsaan Malaysia, 2012. References : page [223]-224. Subjects--Corporate Names: Universiti Kebangsaan Malaysia--Dissertations. Subjects--Topical Terms: Dissertations, Academic--Malaysia.Biosensors.Microelectromechanical systems.Biomedical materials.BioMEMS.