Whitehouse, D. J.

Handbook of surface and nanometrology / by David J. Whitehouse. - 2nd ed. - Boca Raton, Mass. : CRC Press, 2011. - xxiii, 975 p. : ill. ; 29 cm.

Rev. ed. of: Handbook of surface metrology. c1994.

Includes bibliographical references and index.

9781420082012 (hbk.) RM967.86


Surfaces (Technology)--Measurement.