Feedback control of MEMS to atoms - Gorman, Jason J.; Shapiro, Benjamin, 1973- (New York : Springer, 2012)
Introduction / Jason J. Gorman and Benjamin Shapiro -- Feedback control of particle size distribution in nanoparticle synthesis and processing / Mingheng Li and Panagiotis D. Christofides -- In situ optical sensing and state estimation for control of surface processing / Rentian Xiong and Martha A Grover -- Automated tip-based 2-D mechanical assembly of micro/nonparticles / Cagdas D. Onal, Onur Ozcan, and Metin Sitti -- Atomic force microscopy : principles and systems viewpoint enabled methods / Srinivasa Salapaka and Murti Salapaka -- Feedback control of optically trapped particles / Jason J. Gorman, Arvind Balijepalli, and Thomas W. LeBrun -- Position control of MEMS / Michael S.-C. Lu -- Dissecting tuned MEMS vibratory Gyros / Dennis Kim and Robert T. M'Closkey -- Feedback control of microflows / Mike Armani ... [et al.] -- Problems in control of quantum systems / Navin Khaneja -- Common threads and technical challenges in controlling micro- and nanoscale systems / Benjamin Shapiro and Jason J. Gorman.
Includes bibliographical references and index.
Keywords: Feedback control systems; Microelectromechanical systems; Microelectronics