TY  - BOOK
AU  - Baudrant,Annie
TI  - Silicon technologies: ion implantation and thermal treatment 
SN  - 9781848212312 (hbk)
PY  - 2011///
CY  - London
PB  - Wiley
KW  - Semiconductor doping
KW  - Ion implantation
KW  - Semiconductors
KW  - Heat treatment
N1  - Includes bibliographical references and index
N2  - The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion
ER  -