Fabrikasi sensor tekanan kapasitif sangat rendah (STKSR) menggunakan teknologi proses piawai CMOS - Muhammad Ramdzan Buyong (2010)
Tesis (M.Sc.) - Universiti Kebangsaan Malaysia, 2010.
Rujukan : p. 194-198.
Keywords: Universiti Kebangsaan Malaysia -- Dissertations; Dissertations, Academic -- Malaysia; BioMEMS; Metal oxide semiconductors; Detectors; Microelectronics; Microelectromechanical systems; Electromechanical devices