TY  - BOOK
AU  - Landis,Stefan
TI  - Nano-lithography
SN  - 9781848212114 (hbk.)
PY  - 2011///
CY  - Hoboken, NJ
PB  - Wiley
KW  - Microlithography
KW  - Nanotechnology
N1  - Includes bibliographical references and index; Ch. 1. X-ray lithography : fundamentals and applications -- ch. 2. NanoImprint lithography -- ch. 3. Lithography techniques using scanning probe microscopy -- ch. 4. Lithography and manipulation based on the optical properties of metal nanostructures -- ch. 5. Patterning with self-assembling block copolymers -- ch. 6. Metrology for lithography
ER  -