Nano-lithography - Landis, Stefan (Hoboken, NJ : Wiley, 2011)
Ch. 1. X-ray lithography : fundamentals and applications -- ch. 2. NanoImprint lithography -- ch. 3. Lithography techniques using scanning probe microscopy -- ch. 4. Lithography and manipulation based on the optical properties of metal nanostructures -- ch. 5. Patterning with self-assembling block copolymers -- ch. 6. Metrology for lithography.
Includes bibliographical references and index.
Keywords: Microlithography; Nanotechnology