TY  - BOOK
AU  - Wiederrecht,Gary P.
TI  - Handbook of nanofabrication
SN  - 9780123751768
PY  - 2010///
CY  - Amsterdam
PB  - Elsevier
KW  - Nanostructured materials
KW  - Handbooks, manuals, etc
KW  - Nanoscience
KW  - Nanotechnology
KW  - Nanostructures
N1  - Includes References (p. 285-289) and index
ER  -