Okoroanyanwu, Uzodinma. Chemistry and lithography / Uzodinma Okoroanyanwu. - Bellingham, Wash. : SPIE Press, 2010. - xxix, 861 p. : ill. ; 26 cm. - Press monograph ; 192 . ISBN: 9780819475626 RM351.75 9781118030028 Subjects--Topical Terms: Lithography.Chemistry, Technical.