TY  - BOOK
AU  - Kaschieva,S.
AU  - Dmitriev,S.N.
TI  - Radiation defects in ion implanted and/or high-energy irradiated MOS structures
T2  - Electrical engineering developments series
SN  - 9781608761883 (hbk.)
PY  - 2010///
CY  - New York
PB  - Nova Science Publishers
KW  - Metal oxide semiconductors
KW  - Semiconductor doping
KW  - Semiconductors
KW  - Effect of radiation on
KW  - Ion implantation
N1  - Includes bibliographical references and index
ER  -