TY  - BOOK
AU  - Ma,Xu
AU  - Arce,Gonzalo R.
TI  - Computational lithography
T2  - Wiley series in pure and applied optics
SN  - 9780470596975 (hbk.)
PY  - 2010///
CY  - Hoboken, N.J.
PB  - Wiley
KW  - Microlithography
KW  - Mathematics
KW  - Integrated circuits
KW  - Design and construction
KW  - Photolithography
KW  - Semiconductors
KW  - Etching
KW  - Resolution (Optics)
N1  - Includes bibliographical references (p. 217-222) and index
ER  -