Computational lithography - Ma, Xu, 1983-; Arce, Gonzalo R. (Hoboken, N.J. : Wiley, 2010)
Includes bibliographical references (p. 217-222) and index.
Keywords: Microlithography -- Mathematics; Integrated circuits -- Design and construction -- Mathematics; Photolithography -- Mathematics; Semiconductors -- Etching -- Mathematics; Resolution (Optics)