TY  - BOOK
AU  - Franssila,Sami
TI  - Introduction to microfabrication
SN  - 9780470749838
PY  - 2010///
CY  - Chichester, West Sussex, England
PB  - John Wiley & Sons
KW  - Microelectromechanical systems
KW  - Electronic apparatus and appliances
KW  - Microfabrication
N1  - Includes index
ER  -