Franssila, Sami. <br/><br/>
Introduction to microfabrication / 
Sami Franssila. 
 - 2nd ed. 
 - Chichester, West Sussex, England :  John Wiley & Sons,  2010. 
 - xiv, 518 p. :  ill. ;  25 cm. 
<br/><br/> Includes index. 
<br/><br/><label>ISBN: </label>9780470749838  RM244.80 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>Electronic apparatus and appliances.<br/>Microfabrication.