TY  - BOOK
AU  - Gao,Wei
ED  - SpringerLink (Online service)
TI  - Precision nanometrology: sensors and measuring systems for nanomanufacturing 
SN  - 9781849962544
PY  - 2010///
CY  - London
PB  - Springer-Verlag London
KW  - Nanostructured materials
KW  - Measurement
KW  - Manufacturing, Machines, Tools
KW  - Control , Robotics, Mechatronics
KW  - Nanotechnology
KW  - Measurement Science and Instrumentation
UR  - https://eresourcesptsl.ukm.remotexs.co/user/login?url=http://dx.doi.org/10.1007/978-1-84996-254-4
ER  -