Gao, Wei. <br/><br/>
Precision nanometrology  sensors and measuring systems for nanomanufacturing /  [electronic resource] : 
by Wei Gao. 
 - London :  Springer-Verlag London,  2010. 
 - 1online resource (xiii, 354 pages) :  illustrations, digital. 
 - Springer series in advanced manufacturing,  1860-5168 .
<br/><br/><label>ISBN: </label>9781849962544 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Nanostructured materials--Measurement.<br/>Manufacturing, Machines, Tools.<br/>Control , Robotics, Mechatronics.<br/>Nanotechnology.<br/>Measurement Science and Instrumentation.