TY  - BOOK
AU  - El-Kareh,Badih
TI  - Silicon devices and process integration: deep submicron and nano-scale technologies 
SN  - 9780387367989
PY  - 2009///
CY  - New York
PB  - Springer
KW  - Metal oxide semiconductors, Complementary
KW  - Linear integrated circuits
KW  - Design
N1  - Includes bibliographical references and index
ER  -