El-Kareh, Badih <br/><br/>
Silicon devices and process integration :  deep submicron and nano-scale technologies / 
Badih El-Kareh 
 - New York :  Springer,  2009 
 - xxv, 597 p. :  ill. ;  24 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9780387367989 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Metal oxide semiconductors, Complementary<br/>Linear integrated circuits--Design