TY  - BOOK
AU  - Wu,Banqiu
AU  - Kumar,Ajay
TI  - Extreme ultraviolet lithography
SN  - 9780071549189 (hbk.)
PY  - 2009///
CY  - New York
PB  - McGraw-Hill
KW  - Extreme ultraviolet lithography
KW  - Integrated circuits
KW  - Masks
KW  - Design and construction
N1  - Includes bibliographical references and index
ER  -