TY  - BOOK
AU  - Korvink,J.G.
AU  - Paul,Oliver
ED  - SpringerLink (Online service)
TI  - MEMS: a practical guide to design, analysis, and applications 
SN  - 9783540336556 (electronic bk.)
AV  - TK7875 .M42 2006
U1  - 621 22
PY  - 2006///
CY  - Berlin, Heidelberg
PB  - Springer-Verlag Berlin Heidelberg
KW  - Microelectromechanical systems
UR  - https://eresourcesptsl.ukm.remotexs.co/user/login?url=http://dx.doi.org/http://dx.doi.org/10.1007/978-3-540-33655-6
ER  -