MEMS  a practical guide to design, analysis, and applications /  [electronic resource] : 
edited by Jan G. Korvink, Oliver Paul. 
 - Berlin, Heidelberg :  Springer-Verlag Berlin Heidelberg,  2006. 
 - xxv, 965 p. :  ill., digital ;  24 cm. 
<br/><br/><label>ISBN: </label>9783540336556 (electronic bk.) 9783540211174 (paper) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.
<br/><br/><label>LC Class. No.: </label>TK7875  / .M42 2006 
<br/><br/><label>Dewey Class. No.: </label>621