Micro and nano mechanical testing of materials and devices - Li, James C.M.; Yang, Fuqian; SpringerLink (Online service) (Boston, MA : Springer-Verlag US, 2008)
Keywords: Materials -- Testing; Microelectromechanical systems -- Testing; Nanoelectromechanical systems -- Testing; Nanotechnology; Chemistry; Surfaces and Interfaces, Thin Films; Tribology, Corrosion and Coatings; Characterization and Evaluation of Materials