TY  - BOOK
AU  - Lieberman,Alvin
TI  - Contamination control and cleanrooms: problems, engineering solutions, and applications 
SN  - 0442005741
PY  - 1992///
CY  - New York
PB  - Van Nostrand Reinhold
KW  - Clean rooms
KW  - Decontamination (From gases, chemicals, etc.)
ER  -