Pembangunan akselerometer berdasarkan proses polisilikon epitaksi tebal - Mohd Ismahadi Syono (Bangi, Selangor : Perpustakaan Tun Seri Lanang, Universiti Kebangsaan Malaysia, 2010)
Tesis (Ph.D) - Universiti Kebangsaan Malaysia, 2008
Rujukan : p. [153]-156
Keywords: Universiti Kebangsaan Malaysia -- Dissertations; Dissertations, Academic -- Malaysia; Accelerometers; Microelectromechanical systems; Thick epitaxial polysilicon