MEMS  design and fabrication /  [electronic resource] : 
edited by Mohamed Gad-el-Hak 
 - 2nd ed. 
 - Boca Raton, FL :  CRC/Taylor & Francis,  2006 
 - Mechanical engineering series .
 - Mechanical engineering series (Boca Raton, Fla.) .
<br/><br/> Access to 2http://www.egnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>0849391385 
<br/><br/><label>LCCN: </label>2005-050109 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Design and construction<br/>Microfabrication
<br/><br/><label>Dewey Class. No.: </label>621.381