TY  - BOOK
AU  - Jackson,Mark J.
TI  - Microfabrication and nanomanufacturing
SN  - 0824724313
U1  - 620/.5 22
PY  - 2005///
CY  - Boca Raton, FL
PB  - Taylor & Francis
KW  - Microelectronics
KW  - Integrated circuits
KW  - Design and construction
KW  - Microelectromechanical systems
N1  - Access to 2http://www.egnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen; Includes bibliographical references and index
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UR  - http://www.engnetbase.com/ejournals/books/book_km.asp?id=4077
ER  -