Microfabrication and nanomanufacturing  [electronic resource] / 
[edited by] Mark J. Jackson 
 - Boca Raton, FL :  Taylor & Francis,  2005 
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<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>0824724313 
<br/><br/><label>LCCN: </label>2005-049275 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics<br/>Integrated circuits--Design and construction<br/>Microelectromechanical systems--Design and construction
<br/><br/><label>Dewey Class. No.: </label>620/.5