TY  - BOOK
AU  - Lyshevski,Sergey Edward
TI  - Nano- and microelectromechanical systems: fundamentals of nano- and microengineering 
SN  - 0849309166
U1  - 621.381 21
PY  - 2001///
CY  - Boca Raton
PB  - CRC Press
KW  - Microelectromechanical systems
N1  - Access to 2http://www.egnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen; Includes bibliographical references and index
UR  - https://eresourcesptsl.ukm.remotexs.co/login?url=uhttp://www.egnetbase.com/ejournals/search/advsearch1.asp
UR  - http://www.engnetbase.com/ejournals/books/book_km.asp?id=434
ER  -