Lyshevski, Sergey Edward <br/><br/>
Nano- and microelectromechanical systems  fundamentals of nano- and microengineering /  [electronic resource] : 
Sergey Edward Lyshevski 
 - Boca Raton :  CRC Press,  c2001 
 - Nano- and microscience, engineering, technology, and medicine series .
<br/><br/> Access to 2http://www.egnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>0849309166 
<br/><br/><label>LCCN: </label>00-057953 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems
<br/><br/><label>Dewey Class. No.: </label>621.381