Micro-optomechatronics [electronic resource] /
Hiroshi Hosaka ... [et al.]
- New York : Marcel Dekker, c2005
- Optical engineering ; v. 92 .
- Optical engineering (Marcel Dekker, Inc.) ; v. 92 .
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Includes bibliographical references and index
0824759834
2005-040722
Microelectromechanical systems Mechatronics Nanotechnology Optoelectronic devices