Micro-optomechatronics [electronic resource] / Hiroshi Hosaka ... [et al.] - New York : Marcel Dekker, c2005 - Optical engineering ; v. 92 . - Optical engineering (Marcel Dekker, Inc.) ; v. 92 .

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Includes bibliographical references and index

0824759834

2005-040722


Microelectromechanical systems
Mechatronics
Nanotechnology
Optoelectronic devices

621.382