TY  - BOOK
AU  - Diebold,A.C.
TI  - Handbook of silicon semiconductor metrology
SN  - 0824705068
U1  - 621.3815/2 21
PY  - 2001///
CY  - New York
PB  - Marcel Dekker
KW  - Semiconductors
KW  - Measurement
KW  - Inspection
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ER  -