Handbook of silicon semiconductor metrology  [electronic resource] / 
edited by Alain C. Diebold 
 - New York :  Marcel Dekker,  2001 
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<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>0824705068 
<br/><br/><label>LCCN: </label>2001-028943 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Measurement<br/>Semiconductors--Inspection
<br/><br/><label>Dewey Class. No.: </label>621.3815/2