TY  - BOOK
AU  - Sherer,J.Michael
TI  - Semiconductor industry: wafer fab exhaust management 
SN  - 1574447203
U1  - 621.3815/2/0286 22
PY  - 2005///
CY  - Boca Raton
PB  - CRC/Taylor & Francis
KW  - Semiconductor wafers
KW  - Design and construction
KW  - Semiconductor industry
KW  - Environmental aspects
KW  - Volatile organic compounds
KW  - Air
KW  - Purification
KW  - Technological innovations
N1  - Access to 2http://www.engnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen; Includes index
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UR  - http://www.engnetbase.com/ejournals/books/book_km.asp?id=4666
ER  -