Sherer, J. Michael,  1958- <br/><br/>
Semiconductor industry  wafer fab exhaust management /  [electronic resource] : 
 Wafer fab exhaust management 
J. Michael Sherer 
 - Boca Raton :  CRC/Taylor & Francis,  2005 
<br/><br/> Access to 2http://www.engnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen  Includes index 
<br/><br/><label>ISBN: </label>1574447203 
<br/><br/><label>LCCN: </label>2005-050566 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductor wafers--Design and construction<br/>Semiconductor industry--Environmental aspects<br/>Volatile organic compounds--Environmental aspects<br/>Air--Purification--Technological innovations
<br/><br/><label>Dewey Class. No.: </label>621.3815/2/0286