TY  - BOOK
AU  - Allen,James J.
TI  - Micro electro mechanical system design
T2  - Mechanical engineering
SN  - 0824758242
U1  - 621 22
PY  - 2005///
CY  - Boca Raton
PB  - Taylor & Francis
KW  - Microelectromechanical systems
KW  - Design and construction
KW  - Engineering design
N1  - Access to 2http://www.engnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen; Includes bibliographical references and index
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ER  -