Allen, James J. <br/><br/>
Micro electro mechanical system design  [electronic resource] / 
James J. Allen 
 - Boca Raton :  Taylor & Francis,  2005 
 - Mechanical engineering ;  192 .
 - Mechanical engineering (Taylor & Francis) ;  192 .
<br/><br/> Access to 2http://www.engnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>0824758242 
<br/><br/><label>LCCN: </label>2005-041771 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Design and construction<br/>Engineering design
<br/><br/><label>Dewey Class. No.: </label>621