X-ray metrology in semiconductor manufacturing - Bowen, D. Keith (David Keith), 1940-; Tanner, B. K. (Brian Keith) (Boca Raton : CRC/Taylor & Francis, 2006)
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Includes bibliographical references and index
Keywords: Semiconductors -- Design and construction -- Quality control; Integrated circuits -- Measurement; Semiconductor wafers -- Inspection; X-rays -- Diffraction; Fluroscopy