TY  - BOOK
AU  - Ohmi,Tadahiro
TI  - Scientific wet process technology for innovative LSI/FPD manufacturing
SN  - 0849335434 (alk. paper)
U1  - 621.3815/2 22
PY  - 2006///
CY  - Boca Raton, FL
PB  - CRC/Taylor & Francis
KW  - Semiconductors
KW  - Design and construction
KW  - Cleaning
KW  - Integrated circuits
N1  - Access to 2http://www.egnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen; Includes bibliographical references and index
UR  - https://eresourcesptsl.ukm.remotexs.co/login?url=http://www.egnetbase.com/ejournals/search/advsearch1.asp
UR  - http://www.engnetbase.com/ejournals/books/book_km.asp?id=5038
ER  -