Scientific wet process technology for innovative LSI/FPD manufacturing  [electronic resource] / 
edited by Tadahiro Ohmi 
 - Boca Raton, FL :  CRC/Taylor & Francis,  2006 
<br/><br/> Access to 2http://www.egnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>0849335434 (alk. paper) 
<br/><br/><label>LCCN: </label>2005-024414 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction<br/>Semiconductors--Cleaning<br/>Integrated circuits--Design and construction
<br/><br/><label>Dewey Class. No.: </label>621.3815/2