TY  - BOOK
AU  - Doering,Robert
AU  - Nishi,Yoshio
TI  - Handbook of semiconductor manufacturing technology
SN  - 9781574446753
U1  - 621.3815/2 22
PY  - 2007///
CY  - Boca Raton
PB  - CRC/Taylor & Francis
KW  - Semiconductors
KW  - Design and construction
KW  - Handbooks, manuals, etc
KW  - Semiconductor industry
N1  - Access to 2http://www.egnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen; Includes bibliographical references and index
UR  - https://eresourcesptsl.ukm.remotexs.co/login?url=http://www.egnetbase.com/ejournals/search/advsearch1.asp
UR  - http://www.engnetbase.com/ejournals/books/book_km.asp?id=5611
ER  -