Handbook of semiconductor manufacturing technology  [electronic resource] / 
Second Edition edited by Robert Doering and Yoshio Nishi 
 - Boca Raton :  CRC/Taylor & Francis,  2007 
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<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9781574446753 1574446754 
<br/><br/><label>LCCN: </label>2006-102599 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction--Handbooks, manuals, etc.<br/>Semiconductor industry--Handbooks, manuals, etc
<br/><br/><label>Dewey Class. No.: </label>621.3815/2