TY  - BOOK
AU  - Minh,Phan Ngoc
AU  - Takahito,Ono
AU  - Esashi,Masayoshi
TI  - Fabrication of silicon microprobes for optical near-field applications
SN  - 0849311543
U1  - 621.36 21
PY  - 2002///
CY  - Boca Raton, Fla.
PB  - CRC Press
KW  - Micromachining
KW  - Silicon
KW  - Near-field microscopy
KW  - Microprobe analysis
N1  - Access to 2http://www.egnetbase.com/ejournals/search/advsearch1.asp3 and type in the title. You may access the full text after you type in the advanced search screen; Includes bibliographical references and index
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UR  - http://www.engnetbase.com/ejournals/books/book_km.asp?id=5772
ER  -